| 摘要 |
PROBLEM TO BE SOLVED: To prevent the extinction of plasma and to stabilize a decomposition reaction by supplying dry water vapor stably. SOLUTION: In the apparatus, a gas containing an organohalogen compound is irradiated with microwaves to produce thermal plasma, in which the compound is reacted with water vapor to decompose the compound. A heater 18 for producing water vapor by passing water supplied from a water storage tank is installed in a channel 34b formed in a heater main body 18b. A packing member 35 for closing the channel 34b is provided in the channel 34b with a clearance for communicating from the inlet side to the outlet side of the channel 34b left. In this way, water can be heated uniformly in a state in which the contact time with the heater 18 and the contact area are secured sufficiently. |
