| 摘要 |
PROBLEM TO BE SOLVED: To suppress the uneven abrasion of a fixed abrasive grain pellet by dividing a pellet into a specified number or more of specifications in the radial direction of a surface plate, and setting the difference between maximum value minimum value generated in the surface plate radial direction of the polishing ratio of pellet to workpiece represented by a specified expression smaller than that in a pellet of single specification. SOLUTION: A pellet is divided into two or more specification in the radial direction of a surface plate 1, and the difference between maximum value and minimum value generated in the radial direction of the surface plate of the polishing ratio of pellet to workpiece or polishing ratio = (polishing volume of workpiece)/(abrasive volume of pellet) is set so as to be smaller than that in the sticking of a pellet of single specification. For example, fixed abrasive grain pellets 2a, 2b are stuck to the surface plate 1, and the polishing ratio of the pellet 2a near the rotating center to glass plate is regulated so as to be closer to the polishing ratio of the circumferential pellet 2b. According to this, the uneven abrasion of the surface plate pellet can be suppressed. |
