发明名称 PRODUCTION OF ALUMINUM-CONTAINING MEMBER AND ALUMINUM-CONTAINING MEMBER
摘要 PROBLEM TO BE SOLVED: To provide a new method of forming nitride on the surface of a prescribed base material by a simple method. SOLUTION: A base material contg. at least aluminum is subjected to heating treatment preferably at a temp. of 450 to 600 deg.C under a vacuum of <=10-3 torr, prefreably of <=5×10-4 torr. Then, continuously to this heating treatment, nitriding treatment under heating is executed preferably at a temp. of 450 to 600 deg.C, preferably in an N2 atmosphere under a gas pressure of 1 to 9.5 kgf/cm2 to form nitride on the surface of the base material.
申请公布号 JP2000290767(A) 申请公布日期 2000.10.17
申请号 JP19990059011 申请日期 1999.03.05
申请人 NGK INSULATORS LTD 发明人 KATSUTA YUJI;TSUTSUMI TAKETOSHI;MASUDA MASAAKI
分类号 H01L23/373;C22F1/00;C22F1/043;C23C8/02;C23C8/24;C23C12/02;(IPC1-7):C23C8/24 主分类号 H01L23/373
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