| 摘要 |
PROBLEM TO BE SOLVED: To provide a refrigerating chuck capable of wet machining. SOLUTION: This chuck rigidly holds a work piece 6 by cooling a holding part 3 by a cooler 8 and freezing a coagulant, for example, water, inside the holding part 3. And in this state, the work piece 6 is ground by a grinding wheel 52 of a machining tool 5. When doing so, to suppress frictional heat between the grinding wheel 52 and the work piece 6, a lubricating liquid, for example, water 10, is fed by a lubricating liquid feeding device 11 to a friction portion of both. Because of this feeding of the water 10, temperature of the holding part 3 rises (in detail, the holding part 3 is heated by the water 10) and a holding power of the holding part 3 of the work piece 6 gradually declines. But the holding power of the holding part 3 of the work piece 6 is maintained at a rigid state because a control part 12 controls a feed amount of the water 10 by the lubricating liquid feeding device 11 in accordance with the temperature of the holding part 3 detected and obtained by a temperature sensor 7.
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