DEVICE AND METHOD FOR SUPPLYING OZONE

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for supplying ozone, which is capable of continuously supplying ozone in a prescribed concentration even in the case that the quantity of ozone to be used in an ozone using equipment exceeds the capacity of an ozonizer. SOLUTION: An ozone adsorber 13 for adsorbing ozone in a cooling state and desorbing ozone in a heating state is provided in a passage between the ozonizer 11 and the ozone using equipment 14 and an ozone supply passage 211 for supplying an ozone-containing gas generated in the ozonizer 11 to the ozone using equipment 14 without passing through the ozone adsorber 13 is provided.