| 摘要 |
PROBLEM TO BE SOLVED: To efficiently remove a sulfur-containing compound, Cl or the like and moisture by removing water soluble impurities by allowing monogermane gas having the impurities to contact with water and dehydrating entrained moisture with an adsorbent. SOLUTION: The monogermane gas containing the water soluble components as the main impurities is brought into contact with water to remove the water soluble components such as the sulfur-containing compound, Cl or the like. A bubbler, a cleaning tower or the like is used for a method of one contact with water. The contact time with water is controlled to 0.1-1000 sec, preferably 1-300 sec. The initial pH of water to be in contact is preferably controlled to 6-7. The monogermane gas removed in the water soluble components results in containing moisture and the moisture is adsorbed on the adsorbent non- reactive to the monogermane to be removed. As the adsorbent, dried natural zeolite, synthesized zeolite, silica gel, activated alumina, activated carbon and the like are mentioned.
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