发明名称 PRODUCTION OF SILICON CARBIDE CERAMICS
摘要 PROBLEM TO BE SOLVED: To provide a production process for silicon carbide ceramics, by which a silicon carbide ceramic sintered body that can be prevented from being cracked and also has strength capable of withstanding its handling and working, can be produced. SOLUTION: This production process comprises: mixing 3-50 pts.wt. of a carbon source compound, 10-30 pts.wt. of a crosslinkable resin and 100 pts.wt. of a liquid having compatibility with the carbon source compound and the crosslinkable resin, together to obtain a mixed liquid; also mixing a powdery raw material consisting of 100 pts.wt. of powdery SiC and 0.5-5 pts.wt. of powdery carbon, with a 15-40 pts.wt of this mixed liquid, to form a slurry; adding a hardening agent to the slurry; casting the resulting slurry into a prescribed mold, to harden the slurry and to obtain a hardened body; and drying the hardened body and thereafter, sintering the dried body in a non-oxidizing atmosphere to produce the objective silicon carbide ceramic sintered body.
申请公布号 JP2000290074(A) 申请公布日期 2000.10.17
申请号 JP19990102215 申请日期 1999.04.09
申请人 TOSHIBA CERAMICS CO LTD 发明人 ICHIJIMA MASAHIKO;MORITA TAKASHI;IMURA KOICHI;UEMOTO HIDEO
分类号 H01L21/22;C04B35/565;C04B41/85 主分类号 H01L21/22
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