| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and a device for laser beam trimming capable of conducting laser beam trimming in a high precision and at a high speed. SOLUTION: A trimming laser beam, which passes an opening part 1031 and makes incident to an objective lens 104, is moved by moving a mask part 103 having the opening part 1031, a working spot is moved over a region to be trimmed. By this constitution, because a moving quantity of the working spot is reduced by a magnification rate of the objective lens, a moving quantity of the mask part 103 can be made larger as compared to the moving quantity of the working spot, positioning of the working spot can be done in a high precision as compared to a conventional way. Further, because a mask part is lighter than an optical system, high speed movement is made possible.</p> |
