FORMATION OF THIN FILM AND THIN FILM FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an industrial method capable of inexpensively producing a thin film of a large area uniform in film quality with high reproducibility. SOLUTION: In the method in which a raw material soln. is pulverized in an ultrasonic vibrating tank 14, thereafter, the obtd. fine particles are sprayed onto a heated substrate 24 together with carrier gas via a fine powder spraying nozzle 17 to form a thin film, fine particles in which particle size distribution and flow are controlled by a classifying device 15 and a pressure buffer 16 are fed to the fine particle spraying nozzle 17 in which the flow rate, flow velocity and temp. are controllable to divided plural zones. In this way, uniform thin film formation is made possible with high reproducibility.