| 摘要 |
PURPOSE: An apparatus for fixing a clamp of a semiconductor device is provided to save the assembling time and to improve the working reliance by allowing the clamp to be easily assembled when a fault of the clamp occurs. CONSTITUTION: A clamp fixing apparatus comprises a clamp ring(40) formed at one end thereof with a first insertion hole(45) into which a first plug is inserted. A ceramic clamp(50) is coupled to the clamp ring(45). The ceramic clamp(45) is formed at one end thereof with a second insertion hole(55) into which a second plug is inserted. A cylindrical plug(60) is coupled through a first and a second insertion holes(45,55) of the clamp ring(40) and the ceramic clamp(45). A plurality of protrusions(42,52,62) are provided at the first and the second insertion holes(45,55) and at a side of the cylindrical plug(60).
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