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发明名称
VACUUM MICRODEVICE AND METHOD OF MANUFACTURING THE SAME
摘要
申请公布号
KR100267201(B1)
申请公布日期
2000.10.16
申请号
KR19970010552
申请日期
1997.03.26
申请人
NEC CORPORATION
发明人
SUZUKI, KENICHIRO
分类号
H01J9/02;H01J1/304;H01J3/02;(IPC1-7):H01J1/30
主分类号
H01J9/02
代理机构
代理人
主权项
地址
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