CONTROLLING APPARATUS OF MICROACTUATOR

摘要

PURPOSE: A controlling device for a micro-actuator is provided to precisely control a location by using an inverse function of non-linearity between a constant power and an input voltage. CONSTITUTION: A displacement sensor(41) detects moved displacement(y1) of a moving body of a micro-actuator(40) for supplying a corresponding signal to one input terminal of a subtract unit(42). A signal corresponding to a reference moved displacement(y2) is inputted through the other input terminal of the subtract unit. A control unit(43) separates a feedback controller and a linearity function. The feedback controller generates a feedback control voltage corresponding to a differential signal from the subtract unit. The linearity function converts the control voltage into a reverse non-linearity for supplying a linearity voltage to an amplify unit(46). The amplify unit amplifies the linearity voltage for supplying as a driving voltage of the micro-actuator.