| 摘要 |
PURPOSE: A method for making a high-temperature superconductive SNS Josephson junction element is provided to reduce an allowable error between products by easily changing a thickness of a conductive oxide material making a line-width of junction or SNS. CONSTITUTION: A first high-temperature superconductive layer of YBCO and a first insulating layer are sequentially deposited on a monocrystal substrate. The first insulating layer and the first high-temperature super conductive layer are partially etched, and a lower electrode is formed to have a predetermined slope. NdBa2Cu3O7-X conductive oxide layer, a second high-temperature superconductive layer and the second insulating layer are sequentially deposited on the exposed lower electrode and the total substrate. A second insulating layer, the second high-temperature superconductive layer and a conductive oxide layer are sequentially etched to form an upper electrode pattern. A contact hole is formed to interconnect the upper electrodes, a metal layer is deposited on the contact hole, is patterned thereby forming an electrode pad.
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