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发明名称
CYCLONE EVAPORATOR
摘要
申请公布号
KR100269560(B1)
申请公布日期
2000.10.16
申请号
KR19960009934
申请日期
1996.04.03
申请人
NOVELLUS SYSTEMS INC.
发明人
BENZING , JEFFREY C.;MCLNERNEY, EDWARD J.;SUSOEFF, MICHAEL N.
分类号
C23C16/44;C23C16/448;H01L21/205;H01L21/285;H01L21/31;(IPC1-7):H01L21/20
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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