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发明名称
APPARATUS FOR CONTROLLING SYSTEM TO MAKE UP WAFER
摘要
申请公布号
KR100269483(B1)
申请公布日期
2000.10.16
申请号
KR19980036569
申请日期
1998.09.04
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, MYUNG HO
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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