PHASE SHIFTING GRATING PROJECTION MOIRE TOPOGRAPHY AND SYSTEM

摘要

PURPOSE: A method for projection type moire using a phase transition grating and a system for the same are provided to improve measuring resolvability by applying a phase transition method to a projection type moire. CONSTITUTION: A projection grating(30) and a reference grating(31) are used as one couple. A relative distance between the projection grating(30) and the reference grating(31) is set up. Gratings of n couples are formed on one quartz glass by using a semiconductor lithography method. A phase transition grating(40) is manufactured by forming grating of n couples. The phase transition is obtained by using the phase transition grating(40).