WAFER CONVEYING APPARATUS OF EMICONDUCTOR DEVICE HAVING ARRANGEMENT DEVICE

摘要

PURPOSE: A wafer conveying apparatus of a semiconductor device having an arrangement device is provided to prevent the wafer from being broken down by using a wafer-conveying fork. CONSTITUTION: A wafer conveying apparatus comprises a supporter(100) which does not make contact with a wafer. The supporter(100) has a flat shape. A wafer resting portion(104) is connected to the supporter(100). The wafer resting portion(104) is provided with a jaw having a predetermined height. The wafer is inserted into a wafer insertion portion(106). A robot arm connection portion(110) is connected to one end of the supporter(100). A fork leveling device(102) is provided to correct the space between forks. The fork leveling device(102) is formed by cutting a side portion of the supporter(100) which is vertical to the robot arm connecting portion(110).