发明名称 METHOD FOR TESTING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A method for testing a semiconductor device is provided to reduce the testing time by accumulating the test results such that the accumulated test results may be used to renew the testing orders. CONSTITUTION: A wafer is loaded and a semiconductor device is tested in a normal mode. If a fist value is large than N(natural number), the semiconductor device is tested in a fuzzy mode up to a second value, which is determined by counting the fault chips, reach to M(natural number). If the first value is less than N or if the second value is larger than M, the semiconductor device is tested in the normal mode. Then, the loaded wafer is determined whether or not it is final chip. If the loaded wafer is not the final chip, the present test mode is determined whether or not it is fuzzy test mode. If the present test mode is the fuzzy mode, the loaded wafer is again determined whether or not it is final chip. If the present mode is not fuzzy mode, the process is feed back to a former step. If the loaded wafer is determined as the final chip, fault parameters, N and M are renewed and the test orders are rearranged.
申请公布号 KR20000060206(A) 申请公布日期 2000.10.16
申请号 KR19990008337 申请日期 1999.03.12
申请人 SAMSUNG ELECTRONICS CO, LTD. 发明人 CHO, BYEONG HWAN;CHOI, BYEONG UK;HONG, GI JUN
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
代理机构 代理人
主权项
地址