| 摘要 |
PURPOSE: A recrystallization device of non-crystalline silicone is provided which performs a dehydrogenation process and a recrystallization process at the same time by using a laser beam and effectively performs the recrystallization process by simply controlling an energy distribution of the laser beam. CONSTITUTION: The recrystallization device comprises: (i) an excimer laser(1) which generates laser beam to dehydrogenate and recrystallize non-crystalline silicone; and (ii) a lens group(2, 3) which makes the energy distribution of the laser beam in a left and right asymmetric triangular form by discording the optical axis of the second lens(3) with the optical axis of the first lens(2).
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