ALIGNMENT KEY OF SEMICONDUCTOR DEVICE

摘要

PURPOSE: An alignment key of a semiconductor device is provided to reduce an alignment error of a semiconductor device by forming the alignment key in such a manner that a plan surface of the alignment key has a lozenge shape with respect to the scanning direction of a stepper. CONSTITUTION: An alignment key of a semiconductor device is used for control the overlap degree between layers of the semiconductor device. The alignment key also controls the alignment of a mask. The alignment key is installed in such a manner that a plan surface of the alignment key of the semiconductor device has a lozenge shape with respect to the scanning direction of a stepper. By the alignment key having the above structure, a sharp signal wave can be obtained.