PLANAR WAVEGUIDE CHIP WITH ABSORPTION PAD AND ITS FABRICATION METHOD

摘要

PURPOSE: An optical waveguide device is provided to be capable of limitedly reducing interference of not-wanted optical signal by absorbing the optical signal reflected or emitted. CONSTITUTION: An optical waveguide device includes a lower cladding layer(202) formed on a substrate(200). An optical waveguide(204) is formed on the lower cladding layer(202). An upper cladding layer(206) surrounds the optical waveguide(204). An absorption layer(208) is formed on the upper cladding layer(206). It is preferred that the thickness of the absorption layer(208) be more than 0.2 micrometers. The substrate(200) employs a material having a good surface planarization such as glass. It is preferred that the upper/lower cladding layers(206,202) employ a material having a light transparency. It is preferred that the absorption layer(208) employ a material containing hydroxyl function group, carboxyl function group, and the first and second amin function groups.