发明名称 |
EXHAUSTING APPARATUS |
摘要 |
PURPOSE: An exhausting apparatus to improve the productivity and quality of articles by preventing particles caused by a turbulent flow. CONSTITUTION: An exhausting apparatus comprises a body(12) one side of which is opened. A first plate(14) is installed at the opened side of the body(12). The first plate(14) is provided with a plurality of holes(15). An exhaust pipe(16) connected to an external exhaust line(40) is coupled to the body(12). A second plate(18) is installed at the body(12) in such a manner that the second plate(18) is overlapped with the first plate(14). The second plate(18) is provided with a plurality of holes(19) which are corresponding to the holes(15) of the first plate(14). An adjusting device for adjusting the overlap degree between the first and second plates(14,18) is provided. The adjusting device moves the second plate(14) by a predetermined distance so as to adjust the position of the holes(15,19) of the first and second plates(14,18).
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申请公布号 |
KR20000061341(A) |
申请公布日期 |
2000.10.16 |
申请号 |
KR19990010301 |
申请日期 |
1999.03.25 |
申请人 |
SAMSUNG ELECTRONICS CO, LTD. |
发明人 |
SHIN, HEUNG SU;OH, YUN CHEOL;LEE, GEON HYEONG;HWANG, TAE JIN |
分类号 |
H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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