| 摘要 |
PURPOSE: A tweezer system for testing a wafer is provided to adsorb a wafer safely and accurately according to the size of wafer based upon predetermined values. CONSTITUTION: When a worker contacts a touch switch (32), a signal from a touch signal unit is transmitted to an input terminal of microcomputer via a signal processor. Regarding the contact action as that the worker intends to examine a wafer, the microcomputer operates a vacuum pump and determines the vacuum adsorption force according to the size of wafer based upon predetermined values stored at a flow controller. When adsorbing the wafer on a wafer carrier into a wafer adsorbing part using the tweezer system, the worker examines the wafer with the naked eye, turning a handle (30). And then, if the worker puts the hand away from the touch switch (32) of the handle (30) after moving the handle (30) to the wafer carrier, the microcomputer stops the operation of the vacuum pump, so a wafer adsorbing part loses the adsorption force. Thereby, the wafer adsorbed to the wafer adsorbing part is loaded onto the wafer carrier due to the weight of the wafer. In addition, the worker can figure out the condition of the adsorption force on the basis of the sign light (16), and a speaker (14) makes an alarm sound in the case of the abnormal condition.
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