APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE EQUIPPED WITH MANOMETER

摘要

PURPOSE: An apparatus for manufacturing a semiconductor device having a manometer is provided to improve the reliance of the measured pressure value by installing a pressure displaying device at a surface of the manometer. CONSTITUTION: An apparatus for manufacturing a semiconductor device comprises a manometer(120) which is installed in the semiconductor device for measuring the pressure in the semiconductor device. A pressure displaying device(200) is installed at a surface of the manometer of the semiconductor device. The pressure displaying device(200) installed on the manometer(120) indicates the measured pressure value. In addition, the pressure displaying device(200) indicates whether the manometer(120) is malfunctioned or not. The manometer(200) has an input/output terminal(130).