| 摘要 |
PURPOSE: A method for manufacturing a piezo-electric device for a micro machine using a ferroelectric thin film is to provide a broad operating range of a spontaneous polarization while reducing an aging to improve an operating reliability. CONSTITUTION: A method for manufacturing a piezo-electric device for a micro machine using a ferroelectric thin film comprises the step of having a hysteresis loop exhibiting a relation of an electric field applied to the ferroelectric thin film and a polarization displacement, have an asymmetry with reference to an origin.
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