OZONE DENSITY MONITORING SYSTEM OF SEMICONDUCTOR DEVICE

摘要

PURPOSE: An ozone density monitoring system of a semiconductor device is provided to improve the working efficiency and the productivity of a semiconductor device by automatically measuring the ozone density in the air remaining in the semiconductor device. CONSTITUTION: An ozone density monitoring system(100) comprises a plurality of semiconductor instruments(200). An automatic air supplying unit(400) is provided to allow the air in the semiconductor instruments(100) and the external air to selectively flow into a body. The automatic air supplying unit(400) is connected to the body through air passages(300). A measuring device is provided to measure the ozone density contained in the air. The measuring device is connected to the automatic air supplying unit(400).