发明名称 HOW TO MEASURE IMAGE OF WAFER FOR USE IN A SEMICONDUCTOR
摘要 PURPOSE: A method for transmitting a result image of a semiconductor wafer detecting device is provided to convert the image signal from the detecting device to monitor into a camera format to directly transmit the result to personal computers. CONSTITUTION: The method for transmitting the result image of the semiconductor wafer detecting device applies to the wafer detecting device which includes an automatic feeder, a flat station, a system computer, and a monitor(3). At the first step, the VGA(video graphics array) waveforms of the image data transferred to the monitor is converted to a camera format of an image grabber board and the result image format is transmitted to an image processing program(7) of the personal computer. At the second step, the detected numeral data attained from the detecting device(100) is transferred to a data processing program(7b) of the personal computer by way of a serial port. At the third step, the image data and the detected numeral data transferred to the personal computer(7) and the image processing program(7a) and the data processing program store the results onto the personal computer.
申请公布号 KR100268814(B1) 申请公布日期 2000.10.16
申请号 KR19980012080 申请日期 1998.04.06
申请人 POSCO HULS CO., LTD. 发明人 LEE, DUK-KWON;LYU, JIN-YOUG
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
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