RETICLE LOADING APPARATUS

摘要

PURPOSE: A reticle loading apparatus is provided to maintain the minimum distance between a reticle and a stage in parallel without the risk of colliding as well as to prevent vibration during operation. CONSTITUTION: The device includes a hand(10), a robot arm(30) and a nozzle(41). The hand holds the reticle. The robot arm is coupled with the hand by way of 4-link two of which facing each other has same length and is capable of moving in all direction and rotating movement. The nozzle is implemented on the stage to inject and absorb air pressure which is adjustable against the reticle. The hand and the robot arm is manufactured to include 4-link each of which faces one another in parallel.