DOUBLE REFRACTION-CONTROLLED WAVEGUIDE USING PIEZOELECTRIC MATERIAL

摘要

PURPOSE: A birefringence optical waveguide is provided to remove a birefringence caused by a remaining stress and adjust the size of a birefringence ratio using a piezoelectric thin film. CONSTITUTION: A birefringence optical waveguide includes a substrate(100). A core layer(110) waveguides an optical signal. A cladding layer(120) is formed on the substrate(100) and surrounds the core layer(110). A piezoelectric film(130) is located within or outside the cladding layer(120) and generates stress to the waveguide by means of the stress if a voltage is applied. The piezoelectric film(130) limits or adjusts the size of birefringence ratio relating to the stress. It is preferred that the piezoelectric layer(130) be located on the cladding layer(120).