发明名称 APPARATUS FOR MAINTAINING ILLUMINANCE OF EXPOSED BEAM SOURCE
摘要 PURPOSE: An apparatus for maintaining the illuminance of an exposed beam source is provided to reduce the manufacturing cost of articles by increasing the productivity of articles per time. CONSTITUTION: An illuminance maintaining apparatus comprises a voltage supplying device(210) for supplying the voltage to a beam source(10). A voltage varying device(220) varies the voltage supplied to the beam source(10) from the voltage supplying device(210). The illuminance of the beam radiated from the beam source(10) is sensed by an illuminance sensing device(230). A microcomputer(240) is provided to control the voltage variation of the voltage varying device(220) such that the illuminance detected by the illuminance sensing device(230) is maintained with a predetermined illuminance.
申请公布号 KR20000061439(A) 申请公布日期 2000.10.16
申请号 KR19990010479 申请日期 1999.03.26
申请人 ANAM SEMICONDUCTOR., LTD. 发明人 LEE, GWANG SEONG;LEE, CHANG NAM
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址