| 摘要 |
PURPOSE: A wafer conveying apparatus of a stepper is provided to improve the productivity of a wafer by preventing the wafer from breaking. CONSTITUTION: A wafer conveying apparatus(100) is mainly composed of a flat zone arranging device(120), a position shifting device(130), a loading section(150), a wafer cassette(110), and a loader arm(190). The flat zone arranging device(120) arranges a flat zone(116) of a wafer(115) and the position shifting device(130) for shifting the position of the wafer(115) is coupled to the flat zone arranging device(120). The loading section(150) is hinged to the position shifting device(130). The wafer cassette(110) is placed on the loading section(150) and the fetch arm(160) fetches the wafer(115) from the wafer cassette(110). The loader arm(190) conveys the wafer(115) to a process stage. A conveying rail is installed between the fetch arm(160) and the loader arm(190). A side arm(170) moves along the conveying rail so as to transfer the wafer(115) from the fetch arm(160) to the loader arm(190).
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