ELECTROSTATICALLY FOCUSED ADDRESSABLE FIELD EMISSION ARRAY CHIPS (AFEA's) FOR HIGH-SPEED MASSIVELY PARALLEL MASKLESS DIGITAL e-BEAM DIRECT WRITE LITHOGRAPHY AND SCANNING ELECTRON MICROSCOPY

摘要

System and methods are described for addressable field emission array (AFEA) chips. A method of operating an addressable field-emission array, includes: generating a plurality of electron beams from a plurality of emitters that compose the addressable field-emission array; and focusing at least one of the plurality of electron beams with an on-chip electrostatic focusing stack. The system and methods provide advantages including the avoidance of space-charge blow-up.