发明名称 LARGE AREA LOW MASS IR PIXEL HAVING TAILORED CROSS SECTION
摘要 The present invention provides a much more optimum design for an infrared pixel microstructure. The configuration of the microstructure itself is designed to optimum operational characteristics including faster speeds than previously available. These faster speeds are achieved by reducing the therm al mass of the pixel itself, thus directly affecting the pixels associated thermal time constant. Thermal mass is reduced by tailoring the cross sectio n of the pixel structure such that protective layers are substantially reduced in areas where they are not necessary. This results in the desired reduction and overall pixel mass and consequently more optimum pixel performance.</SDO AB>
申请公布号 CA2368974(A1) 申请公布日期 2000.10.12
申请号 CA20002368974 申请日期 2000.03.10
申请人 HONEYWELL INC. 发明人 HIGASHI, ROBERT E.;COLE, BARRETT E.
分类号 G01J1/02;H01L27/14;H01L27/146;H01L37/02;H04N5/33;(IPC1-7):G01J5/20;H01L27/16 主分类号 G01J1/02
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