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发明名称
Kupferbasierte Lösung zum Polieren von Metall und Verfahren zur Herstellung einer Halbleiter-Anordnung
摘要
申请公布号
DE69425812(D1)
申请公布日期
2000.10.12
申请号
DE19946025812
申请日期
1994.12.14
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI
发明人
HIRABAYASHI, HIDEAKI;HIGUCHI, MASATOSHI
分类号
C09G1/02;C23F3/06;H01L21/321;(IPC1-7):H01L21/321
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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