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发明名称
Testschaltung auf einem Halbleiter-Chip
摘要
申请公布号
DE19742946(C2)
申请公布日期
2000.10.12
申请号
DE19971042946
申请日期
1997.09.29
申请人
SIEMENS AG
发明人
BLON, THOMAS
分类号
G01R31/3185;H01L23/544;(IPC1-7):G01R31/28;G01R31/26;H01L21/66
主分类号
G01R31/3185
代理机构
代理人
主权项
地址
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