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发明名称
PROCESS FOR PRODUCING A POROUS LAYER BY AN ELECTROCHEMICAL ETCHING PROCESS
摘要
申请公布号
EP1042794(A1)
申请公布日期
2000.10.11
申请号
EP19980966576
申请日期
1998.12.22
申请人
FORSCHUNGSZENTRUM JUELICH GMBH
发明人
ARENS-FISCHER, RUEDIGER;BERGER, MICHAEL;KRUEGER, MICHAEL;THOENISSEN, MARKUS;LUETH, HANS
分类号
G02B1/11;C25F3/12;H01L21/306;H01L21/3063;H01L21/321;H01L33/34;H01S5/10;(IPC1-7):H01L21/306;H01L33/00
主分类号
G02B1/11
代理机构
代理人
主权项
地址
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