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发明名称
A semiconductor device having a metal barrier layer for a dielectric material having a high dielectric constant and a method of manufacture thereof
摘要
申请公布号
GB0020578(D0)
申请公布日期
2000.10.11
申请号
GB20000020578
申请日期
2000.01.11
申请人
LUCENT TECHNOLOGIES INC
发明人
分类号
H01L21/02;H01L21/316;H01L29/49
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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