发明名称 |
Pressure control system for a vacuum chamber, vacuum pumping unit provided with such a system |
摘要 |
The invention concerns a system for regulating pressure in a chamber (1) containing effluents, connected by pipes (2) to a pumping unit (3) comprising a self-lubricating mechanical primary pump (4) and at least a secondary pump (5). The invention is characterised in that the system comprises a speed regulator (6) controlling simultaneously the rotation speeds of the self-lubricating mechanical primary pump (4) and of the secondary pump (5). |
申请公布号 |
EP1043645(A1) |
申请公布日期 |
2000.10.11 |
申请号 |
EP20000400956 |
申请日期 |
2000.04.07 |
申请人 |
ALCATEL |
发明人 |
ROUSSEAU, CLAUDE;PILOTTI, PATRICK;MAQUIN, PHILIPPE |
分类号 |
F04C18/18;F04B49/06;F04C25/02;F04D27/02;G05D16/20 |
主分类号 |
F04C18/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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