发明名称 Pressure control system for a vacuum chamber, vacuum pumping unit provided with such a system
摘要 The invention concerns a system for regulating pressure in a chamber (1) containing effluents, connected by pipes (2) to a pumping unit (3) comprising a self-lubricating mechanical primary pump (4) and at least a secondary pump (5). The invention is characterised in that the system comprises a speed regulator (6) controlling simultaneously the rotation speeds of the self-lubricating mechanical primary pump (4) and of the secondary pump (5).
申请公布号 EP1043645(A1) 申请公布日期 2000.10.11
申请号 EP20000400956 申请日期 2000.04.07
申请人 ALCATEL 发明人 ROUSSEAU, CLAUDE;PILOTTI, PATRICK;MAQUIN, PHILIPPE
分类号 F04C18/18;F04B49/06;F04C25/02;F04D27/02;G05D16/20 主分类号 F04C18/18
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