| 摘要 |
PROBLEM TO BE SOLVED: To provide an air conveyer capable of fully maintaining cleanliness of a carried article with having its cost reduced. SOLUTION: In an air conveyer 10 to carry a carried article 2 along a carrying face 3 by gas blown out from the carrying face 3 which is formed in the upside of a plenum 9, an enveloping cover 14 which covers the carrying face 3 and has a passing hole to let through the gas blown from the carrying face 3, and a flow control means to limit the gas flow in a carrying direction of the carried article 2 are provided. In this case, the gas blown from the carrying face 3 carries the carried article 2 along the carrying direction for heightening an internal pressure of the cover 14 than an external pressure of the same. And a pressure gradient is formed in a way that the pressure becomes lower in the carrying direction, consequently a back flow of the gas opposite to the carrying direction can be mostly prevented.
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