| 摘要 |
A cleaner of this invention is a cleaner for inspecting projections and removes any substance, e.g., aluminum oxide, which attaches to needle points of probe needles, when the probe needles pierce into the cleaner. The cleaner has a cleaner layer and a substrate. The cleaner layer is constituted by an elastic material layer, and a filler having a surface state improving function of the inspecting projections and dispersed in the elastic material layer. As the filler having a surface state improving function, a powder including at least one of ceramic materials, e.g., sand, glass, alumina, Carborundum (trade name), and the like, or a fiber layer made of an inorganic fiber or organic fiber can be employed.
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