Rf capacitively-coupled electrodeless light source

摘要

An rf capacitively-coupled electrodeless light source is provided. The light source comprises a hollow, elongated chamber and at least one center conductor disposed within the hollow, elongated chamber. A portion of each center conductor extends beyond the hollow, elongated chamber. At least one gas capable of forming an electronically excited molecular state is contained within each center conductor. An electrical coupler is positioned concentric to the hollow, elongated chamber and the electrical coupler surrounds the portion of each center conductor that extends beyond the hollow, elongated chamber. A rf-power supply is positioned in an operable relationship to the electrical coupler and an impedance matching network is positioned in an operable relationship to the rf power supply and the electrical coupler.