发明名称 APPARATUS FOR PULLING SINGLE CRYSTAL, PULLING OF SINGLE CRYSTAL AND PULLEY DEVICE FOR SUPPORTING SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for pulling a single crystal capable of preventing the single crystal from converting into a polycrystal, smoothly and softly moving the own weight of the crystal from a necking part to a holding position such as a constricted part and surely holding the single crystal even if a power failure, etc., occur when pulling the single crystal by a relatively simple constitution at a low cost. SOLUTION: This apparatus for pulling a single crystal is obtained by shakably installing a supporting base as a dishlike member for supporting a diameter enlarged part in the lower part of a seed crystal 21 from the lower side, providing a pulley means 4 capable of rotating the supporting base by own weight thereof and movable between a position without supporting the lower end of the diameter enlarged part of the single crystal from the lower side and a position for supporting the lower end by a rotating angle thereof, arranging pulley rotating means 3a and 3b for rotating the pulley means 4 and moving the above supporting base between the two positions and installing the pulley pulling means 3a and 3b for pulling the pulley means 4 while controlling the speed of the pulley means 4 and thereby pulling the supporting base.
申请公布号 JP2000281484(A) 申请公布日期 2000.10.10
申请号 JP19990094124 申请日期 1999.03.31
申请人 SUPER SILICON KENKYUSHO:KK 发明人 SHIRAISHI YUTAKA
分类号 C30B15/30;(IPC1-7):C30B15/30 主分类号 C30B15/30
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