| 摘要 |
PROBLEM TO BE SOLVED: To improve the cleanliness of an object by cleaning the surface and side of the object simultaneously, to keep an apparatus simple and small, and to reduce the amount of a cleaning liquid. SOLUTION: In an apparatus, a pair of protruded parts 5d is formed on the vibrating surface 5c of a wave guide 5. The cross-sectional shape in the advance direction of ultrasonic vibration is an isosceles right triangle, and the outer wall surface 5f is inclined at 45 degrees with the vibrating surface 5c and the inner wall surface 5e. In this way, the ultrasonic vibration is reflected by the outer wall surface 5f to be deflected in the side 6b direction of a substrate 6.
|
