| 摘要 |
PROBLEM TO BE SOLVED: To stately feed a treating medium in a gaseous state with high flow rate control by providing a 1st heater heating an introducing part receiving a treating medium and the treating medium, an outlet part exhausting the heated treating medium, a 2nd heater heating the outlet part and a control part controlling the heater so as to heat the outlet part at a temp. higher than the eaporating temp. of the treating medium. SOLUTION: A 1st heater 146, a 1st thermocouple 148 and a 1st heater control device 150 operate so as to heat a liq. material of hexafluoroacetylacetonatetrimethylvinylsilane-copper Cu (hfac) TMVS mixed with carrier gas at a 1st heating part 147 at a temp. higher than its evaporating temp. A 2nd heater control device 156 controls a 2nd heater 152 in such a manner that, when the temp. of a 3rd heating part is, e.g. 68 deg.C, the temp. of a 2nd heating part 151 is, e.g. set to 65 deg.C to suppress the decomposing reaction.
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