发明名称 |
PRODUCTION OF MOLD OR MOLD MASTER FOR MICRO-STRUCTURE ARRAY AND PRODUCTION OF MICRO-STRUCTURE ARRAY USING MOLD OR MOLD MASTER |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a highly durable mold or mold master for a micro-structure array. SOLUTION: A method for producing a mold or mold master for a micro- structure array has a process for forming an insulating mask layer 3 on the conductive part 2 of a substrate 1, a process forming a plurality of opening parts 4 having a proper shape to the mask layer 3 to expose the conductive part 2, a process for forming a first electrodeposition or electroplating layer 5 on the opening part 4 and the mask layer by electrodeposition or electroplating using the conductive part 2 as an electrode, a process for removing the mask layer 3 after forming the electrodeposition or electroplating layer 5 on the opening part 4 and the mask layer 3 and a process for forming a second electroplating layer 6 on the electrodeposition or electroplating layer 5 and the conductive part 2 after the mask layer 3 is removed. |
申请公布号 |
JP2000280256(A) |
申请公布日期 |
2000.10.10 |
申请号 |
JP19990094436 |
申请日期 |
1999.04.01 |
申请人 |
CANON INC |
发明人 |
TEJIMA TAKAYUKI;YAGI TAKAYUKI |
分类号 |
B29C33/38;B29L11/00;G02B3/00;(IPC1-7):B29C33/38 |
主分类号 |
B29C33/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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