CORROSION INHIBITOR FOR METAL, CLEANING LIQUID COMPOSITION CONTAINING THE SAME AND CLEANING USING THE SAME

摘要

PROBLEM TO BE SOLVED: To obtain a corrosion inhibitor for a metal without corrosiveness when cleaning a metal, especially copper or a copper alloy, a cleaning liquid composition capable of removing impurities without corroding a copper wiring by adding the corrosion inhibitor to a cleaning liquid for a semiconductor device having a metal wiring, especially the copper wiring and to provide a method for cleaning using the cleaning liquid composition. SOLUTION: This corrosion inhibitor for a metal comprises one or more kinds of compounds selected from imidazoles, thiazoles and triazoles having at least one amino group or at least one thiol group in the molecule. The cleaning liquid composition is obtained by adding the corrosion inhibitor to a cleaning liquid suitable for cleaning a metal to be cleaned. The method for cleaning uses the cleaning agent composition.