| 发明名称 |
Method and structure for crystallizing a film |
| 摘要 |
A method and structure for crystallizing film is disclosed. The method includes the steps of forming a film on a substrate, forming a lens on the film to focus an electro-magnetic wave on the film and directing the electro-magnetic wave on the film inclusive of the lens to crystallize the film.
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| 申请公布号 |
US6130120(A) |
申请公布日期 |
2000.10.10 |
| 申请号 |
US19970895884 |
申请日期 |
1997.07.17 |
| 申请人 |
GOLDSTAR ELECTRON CO., LTD. |
发明人 |
PARK, MIN HWA |
| 分类号 |
H01L21/20;H01L21/336;H01L29/786;(IPC1-7):H01L21/324;H01L21/225 |
主分类号 |
H01L21/20 |
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