| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of obtaining a thin film of crystallized titanium oxide even without executing heating treatment and moreover capable of optionally obtaining a thin film of anatase, rutile or a mixed form of rutile and anatase. SOLUTION: As to the method for producing a titanium oxide film, at the time of hydrolyzing a soln. contg. a titanium alkoxide to prepare a titanium oxide precursory coating soln., stabilizers are not added to the soln., and moreover, as a solvent, a lower alcohol is used. The precursory coating soln. is applied on the surface of a substrate to form a film, thereafter, the thin film is irradiated with ultraviolet light of <=360 nm wavelength, and the irradiating energy density of the ultraviolet light is controlled, by which the thin film is optionally crystallized to any of anatase, a mixed form of anatase and rutile, and rutile.
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