发明名称 HEAT TREATMENT OF FLUORIDE CRYSTAL, PREPARATION OF OPTICAL PART AND OPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To make the cloudiness or discoloring scarcely occur and provide a part and an apparatus excellent in optical characteristics using a fluoride crystal heated in a heat-treating furnace in which the interior is an inert gas under atmospheric pressure or an applied pressure or a fluorine-based gas atmosphere by heating the fluoride crystal. SOLUTION: A fluoride crystal 100 is housed in a crucible 5 of a heat-treating apparatus and a solid scavenger, as necessary, is placed therein. A heat-treating furnace 1 is hermetically sealed and evacuated to about 1.33×103 Pa and a heater 2 is energized. An inert gas, fluorine gas or a mixed gas thereof is introduced and the pressure in the heat-treating furnace 1 is kept in a state of atmospheric pressure or a pressurized state. The crucible 5 is heated at a high temperature so as to regulate the crucible 5 to a prescribed temperature or above and kept at the heat-treating temperature for a prescribed time. The quantity of the energization for the heater 2 is then gradually reduced to naturally cool the crucible 5. When the temperature is reduced to room temperature, the crucible 5 is lowered to take out the fluoride crystal 100. In the case of calcium fluoride, the preferred heat treating temperature is >=1,000 deg.C and the melting point of the calcium fluoride or below.
申请公布号 JP2000281492(A) 申请公布日期 2000.10.10
申请号 JP19990088096 申请日期 1999.03.30
申请人 CANON INC 发明人 CHIBA TAKAO
分类号 H01L21/027;C30B29/12;C30B33/00;G02B1/02;G03F1/60;G03F7/20;H01S3/00 主分类号 H01L21/027
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