| 摘要 |
PROBLEM TO BE SOLVED: To start liquid feed from a main tank to a point of feed in a short time, and to prevent bubbles from being mixed in the liquid in a feeding process from the main tank to the point of feed. SOLUTION: In a liquid feed device 10, a sub tank 12 is connected to a branched pipe 17 which is branched and connected to the middle of a feed pipe 14 extended from a main tank 11 to a point of feed through a change-over valve 16, the liquid to be pushed out of the main tank 11 is respectively fed to the point of feed and the sub tank 12. When the main tank 11 is exchanged, the liquid pushed out of the sub tank 12 is fed to the point of feed.
|
